Metrosol's Short Wavelength Optical Metrology Receives
2006 SEMICON West Technology Innovation Showcase (TIS) Award


Click above to view "Fast, Ultrathin Film Characterization"
Presented July 11 at SEMI West 2006


Austin, TX, June 15, 2006

Metrosol, Inc., a developer, manufacturer and worldwide supplier of innovative short wavelength optical metrology solutions, has been selected among a group of 32 companies to participate at SEMI's Technology Innovation Showcase (TIS), to be held in conjunction with SEMICON West 2006. The three-day special session will take place Tuesday, July 11 through Thursday, July 13 at the TechXPOT exhibit in the Esplanade Hall of the San Francisco Moscone Convention Center.

On Tuesday, July 11 from 4:30 to 4:50 pm, at the Explanade Hall TechXPOT Stage (Manufacturing and Productivity Effectiveness area), Henry Yeung, Business Development Manager, will be delivering an oral presentation on Metrosol's "Fast, Ultrathin Film Characterization".

Mr. Yeung will introduce Metrosol's unique short wavelength optical metrology technology. While typical optical metrology is limited to 190 nm in the DUV wavelength region, Metrosol has developed a proprietary method of collecting optical reflectance data in the VUV wavelength region down to 120 nanometers. These shorter wavelengths enable greater sensitivity on thickness, composition, and optical property measurements on the complex films and stacks necessary to achieve desired device performance.

Target application include, but are not limited to:

-Engineered Substrates: SOI, SSOI, SGOI
-Gate Dielectrics: ONO, SiOxNy, HfO2, HfSiON, ...
-Metal Gate: TiN, TaN, TiO2, nanolaminates, ...
-Silicides: NiSi
-Capacitors: Al2O3, TiN, Ru, ...
-Other Advanced Materials

For more information, please contact the following:

Press Contact
Christopher Castillo
Castle Communications
Phone: +1.408.244.0657

Sales Contact
Sean Jameson
VP of Sales
Phone: +1.512.833.8750
sean.jameson@metrosol.com