Metrosol Accesses Shorter Wavelengths to Provide
Fast, Ultrathin Film Characterization

Austin, TX, July 10, 2006

Metrosol introduces the SHORTY ES (Enhanced Spectrum) Series, short wavelength optical metrology systems, based on the only commercially available technology able to collect optical reflectance data in the VUV (vacuum ultra violet) wavelength region down to 120 nanometers. These shorter wavelengths enable greater sensitivity on thickness, composition, and optical property measurements on the complex films and stacks necessary to achieve desired device performance.

Metrosol uses a unique spectral range from VUV to visible light (120 nm - 800 nm). Typical in-line optical metrology is limited to 190 nm in the DUV (deep ultra violet) region. By extending the range down to 120 nm, Metrosol has essentially doubled the information content provided during measurement, improving sensitivity to changes in composition and thickness (including interfaces). More importantly, unique structure in the VUV provides additional constraints for modeling and makes for robust measurements.

The SHORTY ES 4000's manual load capability is well-suited for laboratory and R&D applications. The Shorty 6000 is a fully automated in-line system designed to fab specifications. Both systems provide extremely fast measurement within a small spot size for ultrathin films.

Henry Yeung, Business Development Manager, says, "The SHORTY ES technology's non-destructive, on-product capability, combined with speed and robustness make it ideal for in-line measurement in a production environment."

Target applications include, but are not limited to:

-Engineered Substrates: SOI, SSOI, SGOI
-Gate Dielectrics: ONO, SiOxNy, HfO2, HfSiON, ...
-Metal Gate: TiN, TaN, TiO2, nanolaminates, ...
-Silicides: NiSi
-Capacitors: Al2O3, TiN, Ru, ...
-Other Advanced Materials

For more information, please contact the following:

Press Contact
Christopher Castillo
Castle Communications
Phone: +1.408.244.0657

Sales Contact
Sean Jameson
VP of Sales
Phone: +1.512.833.8750