Metrosol Introduces Its Patented Production-Worthy VUV Optical
Measurement Technology At SEMICON West

Austin, TX, July 17, 2007

Metrosol, Inc., a developer, manufacturer and worldwide supplier of short wavelength optical metrology solutions today at SEMICON West unveiled its patented vacuum ultraviolet (VUV) wavelength (down to 120 nm) reflectometry technology, optimized for ultra-thin film metrology applications. Metrosol's VUV optical measurement technology is heart of the only high-volume production modular platform capable of measuring both the thickness and composition of high-k and interlayer films used in manufacturing gate structures that meet the performance requirements mandated for 45-nm and smaller production nodes.

In order to meet the performance requirements at 45 nm and below, many semiconductor manufacturers are transitioning from the traditional SiON film composition used in building gate structures. The industry is currently pursuing two alternative solutions, either increasing the nitrogen content in SiON films or moving to more complicated HfSiOx high-k stacks. While increasing the nitrogen content can meet the needs for some applications at the 45-nm node, variations in a film's nitrogen content can significantly change the dielectric properties and electrical performance of the film. The high-k stack approach, on the other hand, adds additional thin film layers and new materials, creating new metrology challenges. Regardless of the approach used, the ability to quickly measure both the film thickness and film composition simultaneously is becoming a critical issue. Metrosol's VUV technology offer the only non-destructive solution capable of providing both these key measurements simultaneously on product wafers, combined with throughput, ease of use and low cost of ownership required for high-volume manufacturing.

"Traditionally, the great challenge for fab metrology has been to provide the optical measurement capabilities of lab analysis tool combined with the throughput, cost of ownership, reliability and ease of use required in a production environment," said Kevin Fahey, Metrosol's president. "As a result, metrology has always been seen as one of the bottlenecks in production. The problem was only exacerbated as the transition to smaller critical dimensions and thinner films mandated increased film measurements to minimize manufacturing risks and ensure a rapid ramp to yield entitlement. Our VUV technology, combined with our modular platform architecture provides the industry with an unprecedented near-real-time, reliable metrology capability for the production environment."

Metrosol's patented VUV reflectometry represents the leading-edge in the industry's ultrathin fim optical measurement technology, allowing precise collection of reflected light from an enhanced spectral range (800 nm all the way down to 120 nm) on a production-worthy platform. Operating in the shorter VUV wavelengths provide critical data unavailable to the fab engineer using other types of reflectometers or ellipsometers. Gauge capable for films below 10Å, Metrosol's VUV technology can decouple film thickness and composition; is sensitive to N content; as well as other low Z elements; and can measure optical properties at and below 193 nm.

The company delivers its leading-edge VUV measurement technology on a unique modular architecture that provides an unprecedented level of flexibility. Depending on the number of metrology modules deployed on the platform, it can be used as a stand-alone lab metrology tool, be fully integrated in to the fab for production use of integrated onto other cluster tools as an in-situ metrology module. Capable of handling up to five metrology modules on a single platform, the system is easily field-upgradeable. In addition, modules can be easily hot-swapped for repair or maintenance, significantly reducing system downtime and platform cost of ownership. Depending on the application or fab requirements, the platform's flexible, modular architecture can process up to 150 wafers per hour even for advanced applications such as high N, SiON and HfO2 high-k dielectrics.

Metrosol leverages its unique Extended Enterprise partnerships to deliver the highest level of system reliability, fab host compatibility and serviceability. This unique manufacturing partnership enables Metrosol to assure its customers of short lead times - as little as three months from order to delivery - and maintain those short lead times even in terms of high industry demand.


For more information, please contact the following:

Press Contact
Christopher Castillo
Castle Communications
Phone: +1.408.244.0657
chris.castillo@metrosol.com

Sales Contact
Henry Yeung
Business Development Manager
Phone: +1.512.833.8750
henry.yeung@metrosol.com