Metrosol Introduces ES-7000 VUV Fab Metrology Tool Capable of
Measuring Both Film Thickness and Composition at 45 nm and Below
Austin, TX, July 17, 2007
Metrosol, Inc., a developer, manufacturer and worldwide supplier of VUV wavelength optical metrology solutions today at SEMICON West introduced the ES-7000 automated in-line metrology system, which provides fab engineers with a non-destructive spectral reflectometry tool operating in the vacuum ultraviolet (down to 120 nm) wavelengths fro use on product wafers. Optimized for semiconductor metrology applications such as measuing the thickness or composition of thin films used to build gate structures, the ES-7000 is the only production-worthy tool capable of measuing both film thickness and composition simultaneously. Gauge-capable even for films below 10Å, Metrosol's new metrology platform can measure optical properties at or below 193 nm, while delivering the required level of sensitivity to N content, as well as other low-Z elements. Depending on the application or fab requirements, the ES-7000's flexible, modular architecture can process up to 150 wafers per hour, even for advanced film applications such as high N, SiON and HfO2 based high-k dielectrics. In addition, the system provides a near real-time ultra-thin measurement capability for the high-k dielectric films and metal and mixed material stacks used for all complex semiconductor structures requiring accurate measurements of thin to ultra-thin films.
Semiconductor manufacturers are currently engaged in changing the composition of the thin films used to build ate structures to meet the performance demands at the 45-nm node and below. The industry is currently pursuing two alternative solutions, either increasing the nitrogen content in SiON films or moving to more complicated HfSiOx high-k stacks. Regardless of the approach used, the ability to quickly measure both the film thickness and film composition simultaneously is becoming a critical issue. Metrosol VUV technology on the ES-7000 platform offers the only non-destructive solution capable of providing these key measurements simultaneously on product wafers combined with the throughput required for high-volume manufacturing.
"The ES-7000 provides the sensitivity of a lab analysis tool coupled with the ease of use, throughput, low cost of ownership (CoO) and reliability required for a production environment," said Kevin Fahey, Metrosol's president. "At two-thirds the price, ten times the throughput and five times the MTBF of a fab analysis tool, the ES-7000 is a best-in-class high-volume production metrology tool. It delivers the critical capabilities required to measure the films used to create the interfacial layers and high-k capacitors used in building the transistors required for today's advanced semiconductor applications."
Built on an easily field-upgradeable modular platform, capable of accommodating up to five metrology modules per system, the ES-7000 offers an unprecedented level of flexibility. For example, the same system, with a single metrology module, can be used during research and development and then be moved to the fab for high-volume production, simply by adding additional modules. This capability ensures the same level of precision and accuracy when transitioning from R&D to production. The ES-7000 metrology module can also be integrated onto other cluser tools as an in-situ metrology module.
Each of the ES-7000's metrology modules has a throughput of up to 30 wafers per our. Modules can be hot-swapped for repair or maintenance, significantly reducing system downtimeand system CoO. In addition, a single system can be used to support the metrology requirements of multiple engineering groups when using a system with multiple load ports and modules.
The ES-7000's modular architecture also helps conserve valuable fab real estate. A two-module system, for example would only take up approximately 2.5 square meters of floor space and stands only 2 meters high.
Metrosol will be shipping ES-7000 production units in the fall of 2007. Thanks to Metrosol's Extended Enterprise approach to manufacturing, lead times for these world-class systems will be as little as three months. this same manufacturing approach, which leverages alliances with other industry leaders such as Asyst Technologies, Owens Design and PeerGroup make Metrosol a leader in system reliability, serviceability and true fab host compatibility.
For more information, please contact the following:
Press Contact
Christopher Castillo
Castle Communications
Phone: +1.408.244.0657
chris.castillo@metrosol.com
Sales Contact
Henry Yeung
Business Development Manager
Phone: +1.512.833.8750
henry.yeung@metrosol.com
