Metrosol Chooses merconics As Its New European Representative
Austin, TX - 01 April 2009
Metrosol, Inc., a developer, manufacturer and worldwide supplier of short wavelength optical metrology solutions, today announced it has chosen merconics GmbH & Co. KG, Munich, Germany, as its representative for Germany, Austria, the Netherlands, Eastern Europe and Scandinavia. Harald Moder, merconics’ founder, is a semiconductor industry veteran, with over 20 years experience in metrology.
“We are very pleased to have added merconics GmbH & Co. KG to the Metrosol team,” said Dean Turnbaugh, Metrosol’s senior director, business development. “Before founding merconics, Mr. Moder served KLA-Tencor as senior director of the company’s Infineon and Central Europe business unit. He has a broad range of experience in both the field of metrology and in the European semiconductor industry. We look forward to benefiting from that experience as we expand our European customer base.”
“We are delighted to be teaming with Metrosol, as they expand their presence in the European semiconductor market,” said Harald Moder, merconics’ founder and president. “Their VUV metrology provides a critical tool that can help European semiconductor manufacturers reduce the development time required to ramp their advanced generation devices to full volume production, as well as helping to ensure high yields by quickly analyzing the causes of yield excursions.”
Metrosol’s patented Tru-VUV™ reflectrometry represents the leading-edge in the industry’s ultrathin film optical measurement technology, allowing precise collection of reflected light from an enhanced spectral range (800 nm to 120 nm) on a production-worthy platform. Operating at these shorter VUV wavelengths provides critical data unavailable to the development or fab engineer using other reflectometers or
ellipsometers. Gauge capable for films below 10 Ǻ, Metrosol’s Tru-VUV© technology can decouple film thickness and composition; is sensitive to N content; as well as other low Z elements; and can measure optical properties at and below 193 nm. The VUV-7000 can provide simultaneous composition and thickness information for the new generation of Hafnia-based film stacks and DRAM/Flash MIM stacks.
This leading-edge VUV measurement technology is delivered on a unique modular architecture that provides an unprecedented level of flexibility. Depending on the number of metrology modules deployed on the platform, it can be used as a stand-alone lab metrology tool, be fully integrated into the fab for production use or integrated onto other cluster tools as an in-situ metrology module. Capable of handling up to five metrology modules on a single platform, the system is easily field-upgradeable. In addition, modules can be easily hot-swapped for repair or maintenance, significantly reducing system downtime and reducing platform cost of ownership. Depending on the application or fab requirements, the platform’s flexible, modular architecture can process up to 100 wafers per hour even for advanced applications such as high N, SiON and HfO2, high-k dielectrics.
About merconics
merconics GmbH & Co. KG is a competent and experienced partner for the distribution of advanced capital equipment and process materials for the European photovoltaic and semiconductor industry and related markets. merconics is also offering business development consulting services.
The systems of our suppliers are used in a variety of segments of the above mentioned markets, such as advanced chip or solar components manufacturing and respective R&D activities. We focus our efforts on providing solutions that enable our customers to meet today’s challenging technology and manufacturing requirements. merconics is a privately-held company based in Munich, Germany. For further information please visit our webpage: www.merconics.com
About Metrosol
Metrosol, Inc., a developer, manufacturer and worldwide supplier of short wavelength optical metrology solutions, delivers advanced thin-film measurement systems that solve the needs of next-generation semiconductor manufacturing such as process monitoring and excursion suppression for high-k gate structures and multilayer dielectric stacks... Metrosol’s VUV optical metrology technology offers the only commercially available platform capable of collecting reflectance data in the vacuum ultraviolet wavelength region down to 120 nm. , Metrosol is a privately-held company based in Austin, Texas. For information please go to www.metrosol.com.
For more information, please contact:
Metrosol Media Contact
Christopher Castillo
Castle Communications
Phone: +1.408.244.0657
Metrosol Sales Contact
Norbert Kappel
VP Sales & Marketing
Phone: +1.408.930.5108
