VUV-7000 Series
VUV Wavelength (800nm - 120nm) Optical Metrology System
The VUV-7000 Series is a powerful, state-of-the-art Vacuum Ultra-Violet (VUV) optical metrology system using an enhanced spectrum that accesses short wavelengths to 120 nm. The inherent speed and sensitivity for on-product ultra-thin film measurement (to 0 Å), coupled with its composition sensitivity make the VUV-7000 series of systems ideal for both development of materials and processes, as well as in-line process control. On-going collaborations with industry partners and customers have demonstrated excellent sensitivity and correlations with SE, XPS, XRR, and TEM.
MODELS
- VUV-7000 In-Line Fab Tool (shown above) - Running Demos Now
- VUV-7000 Laboratory and R&D (shown below)
CAPABILITIES
- Simultaneous thickness and composition
- Optical properties characterization in the VUV region to 120 nm
- VUV-DUV-VIS wavelengths from 800 down to 120 nm
- One tool-product capability of an SE and XPS
- Low Cost of Ownership
- High throughput - > 20 WPH per module (up to 5 modules/system)
- Thickness of thick and thin films and film stacks to 0 Å (including interfaces)
- Composition of binary, ternary and quaternary films (including light elements)
FEATURES
- Small spot for on-product measurements
- High throughput - < 10 seconds per measurement point
- Excellent precision and repeatability
- Up to 300 mm wafers
- Vision system option
- Powerful and easy-to-use Windows® based software
- Small footprint
