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Metrosol's VUV-7000 tool is the best advanced process control (APC) solution available for the 45 nm node and beyond.

Metrosol's patented VUV spectroscopic reflectometry (VUV SR) system provides simultaneous thickness and composition measurement in a production-worthy platform - high precision and high throughput at a lower acquisition cost than current ultra-thin film tools. The system’s on-product capability combined with speed and robustness, make it well-suited for in-line or in-situ applications.

Metrosol provides the fastest, inline, small spot measurement solutions for fabs, equipment and materials suppliers, and wafer manufacturers worldwide. Applications include, but are not limited to:

Simultaneous Thickness & Composition for:

Semiconductor Applications:

• SiON
• HfO & other High-k
• Metal Gate
• MIM Capacitors
  
• Multilayer Dielectrics (SONOS, ONO,
  High-k Capacitor)
  
• ARC Thickness & Optical Properties
  
  

Data Storage Applications:

• Media
• Slider
• TFH Wafer